Télécharger le livre :  Plasma Diagnostics
Plasma Diagnostics, Volume 1: Discharge Parameters and Chemistry covers seven chapters on the important diagnostic techniques for plasmas and details their use in particular applications. The book discusses optical diagnostic techniques for low pressure plasmas and...

Editeur : Academic Press
Parution : 2013-10-22
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Télécharger le livre :  Plasma Diagnostics
Plasmas and their interaction with materials have become subjects of major interest because of their importance in modern forefront technologies such as microelectronics, fusion energy, and space.Plasmas are used in microelectronics to process semiconductors (etching of...

Editeur : Academic Press
Parution : 2013-10-22
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Télécharger le livre :  Plasma Deposition, Treatment, and Etching of Polymers
Plasma Deposition, Treatment, and Etching of Polymers takes a broad look at the basic principles, the chemical processes, and the diagnostic procedures in the interaction of plasmas with polymer surfaces. This recent technology has yielded a large class of new materials...

Editeur : Academic Press
Parution : 2012-12-02
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Télécharger le livre :  Plasma Etching
Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching...

Editeur : Academic Press
Parution : 1989-09-08
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