Téléchargez le livre : Ion Implantation Science and Technology

Ion Implantation Science and Technology



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Éditeur :

Academic Press


Paru le : 2012-12-02



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Description
Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic ions into solids; damage annealing in silicon; and ion implantation metallurgy. Part 2 covers areas such as ion implementation system concepts; ion sources; underlying principles related to ion optics; and safety and radiation considerations in ion implantation. The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.
Pages
648 pages
Collection
n.c
Parution
2012-12-02
Marque
Academic Press
EAN papier
9780127806204
EAN PDF SANS DRM
9780323144018
Informations sur l'ebook
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
57,97 €

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